similar to to-39-3 data sheet 1 1999-04-01 silicon piezoresistive pressure sensor kpy 62-rk kpy 66-rk features ? low pressure and temperature hysteresis ? fast response ? high sensitivity and linearity ? fatigue free monocrystaline silicon diaphragm giving high load cycle stability ? high long term stability ? built in silicon temperature sensor ? metal housing type symbol pressure range unit ordering code kpy 62-rk p 0 ? p n 0 ? 600 mbar q62705-k319 kpy 63-rk 0 ? 1.6 bar q62705-k320 kpy 64-rk 0 ? 4 q62705-k321 kpy 65-rk 0 ? 10 q62705-k322 kpy 66-rk 0 ? 25 q62705-k292 pin configuration 1 temp.- sensor (typ. r 25 = 2 k w ) 2 not to be connected 3+ v in ; temperature sensor 4 - v out 5 capillary 3 6 shielding, to be connected to + v in 7 - v in 8+ v out
kpy 62-rk kpy 66-rk data sheet 2 1999-04-01 absolute maximum ratings parameter symbol limit values 1) unit frontside rearside pressure overload kpy 65-rk kpy 66-rk p max 20 50 10 10 bar operating temperature range t a - 40 ?+ 125 c storage temperature range t stg - 40 ?+ 125 c supply voltage v in 12 v 1) frontside coupling applies pressure onto chip face. rearside coupling applies pressure through kovar centre tube. electrical characteristics at t a = 25 c and v in = 5 v, unless otherwise specified. parameter symbol limit values unit min. typ. max. bridge resistance r b 4 - 8k w sensitivity kpy 65-rk kpy 66-rk s 3.6 1.1 5.2 2.1 8.0 3.0 mv/ vbar output voltage kpy 65-rk kpy 66-rk v fin 180 150 260 260 400 370 mv offset voltage p = p 0 v 0 - 25 -+ 25 mv linearity error (best fit straight line) p 0 = p 0 ? p n f l % v fin kpy 65 ? 66-rk - 0.3 0.5 pressure hysteresis p 1 = p 0 , p 2 = p n , p 3 = p 0 kpy 65 ? 66-rk p h - 0.1 - % v fin
kpy 62-rk kpy 66-rk data sheet 3 1999-04-01 package outline electrical characteristics at t 1 = 25 c, t 2 = 125 c, t 3 = 25 c and v in = 5 v, unless otherwise specified. parameter symbol limit values unit min. typ. max. temperature coefficient of v fin tc vfin %/k kpy 65 ? 66-rk - 0.22 - 0.18 - 0.15 temperature coefficient of v 0 tc v0 %/k kpy 65 ? 66-rk - 0.02 -+ 0.02 temperature coefficient of r b tc rb %/k kpy 65 ? 66-rk -+ 0.23 - temperature hysteresis of v 0 ; v fin th %v. v fin kpy 65 ? 66-rk - 0.2 - gmt05804 5 18.2 0.6 8 ?0.65 -0.1 ?1.05 0.1 ?11.5 5.08 -0.5 0.6 14.2 0.6 0.6 0.6 6.2 0.6 22.2 0.1 ?1.55 3.59 45? 16 0.1 0.5 8 0.1 12 2.6 max 0.1 7.6 9.3 -0.2 basic component component delivery form view on chip bond wire loop 1 5 6 8 4 2 3 7 3.59 5.08 similar to to-39-3 weight approx. 2.0 g sorts of packing package outlines for tubes, trays etc. are contained in our data book package information. dimensions in mm
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